In order to improve the fusion accuracy of the ultrasonic bonding interface,a variable amplitude ul-trasonic bonding method based on fuzzy control is proposed.Two fuzzy controllers with dynamic and static force signals as input and ultrasonic amplitude as output are designed by fuzzy control algorithm.The bonding experiment of polymethyl methacrylate(PMMA)micro-connector and substrate is carried out.In the early stage of bonding,a large amplitude is used to accelerate the initial melting of the contact surface and suppress the overflow defect.In the middle and late stages of bonding,the entire interface is fused with a smaller am-plitude to weaken the ultrasonic cavitation effect.The fusion state of the interface is studied,and the influence of amplitude parameters on bubbles and overflow defects is analyzed.The results show that the bonding quality under the fuzzy variable amplitude control based on static force is the best.The bubbles are basically elimina-ted,the overflow is effectively suppressed,and the fusion accuracy is improved.
ultrasonic bondingfuzzy controlvariation amplitudedynamic forcestatic force
维普
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