首页|Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide(ITO)

Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide(ITO)

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This study delves into ion behavior at the substrate position within RF magnetron discharges utilizing an indium tin oxide(ITO)target.The positive ion energies exhibit an upward trajectory with increasing RF power,attributed to heightened plasma potential and initial emergent energy.Simultaneously,the positive ion flux escalates owing to amplified sputtering rates and electron density.Conversely,negative ions exhibit broad ion energy distribution functions(IEDFs)characterized by multiple peaks.These patterns are clarified by a combination of radiofrequency oscillation of cathode voltage and plasma potential,alongside ion transport time.This elucidation finds validation in a one-dimensional model encompassing the initial ion energy.At higher RF power,negative ions surpassing 100 eV escalate in both flux and energy,posing a potential risk of sputtering damages to ITO layers.

RF magnetron sputteringITO filmion energy distribution functionsplasma diagnosis

李茂洋、莫超超、陈佳丽、季佩宇、谭海云、张潇漫、崔美丽、诸葛兰剑、吴雪梅、黄天源

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School of Physical Science and Technology,Soochow University,Suzhou 215000,People's Republic of China

Key Lab of Thin Film Materials of Jiangsu Province,Suzhou 215000,People's Republic of China

Suzhou Maxwell Technologies Co.Ltd.,Suzhou 215000,People's Republic of China

School of Optical and Electronic Information,Suzhou City University & Suzhou Key Laboratory of Biophotonics,Suzhou 215104,People's Republic of China

School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215000,People's Republic of China

School of Aviation and Transportation,Jiangsu College of Engineering and Technology,Nantong 226006,People's Republic of China

Analysis and Testing Center,Soochow University,Suzhou 215000,People's Republic of China

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financial supports by National Natural Science Foundation of Chinafinancial supports by National Natural Science Foundation of ChinaNantong Basic Science Research-General ProgramNatural Science Research Fund of Jiangsu College of Engineering and Technology

1197516312175160JC22022034GYKY/2023/2

2024

10.1088/2058-6272/ad3599

等离子体科学和技术(英文版)
中国科学院合肥物质科学研究所 中国力学学会

等离子体科学和技术(英文版)

EI
影响因子：0.297
ISSN：1009-0630
年,卷(期)：2024.26(7)