首页|Abnormal transition of the electron energy distribution with excitation of the second harmonic in low-pressure radio-frequency capacitively coupled plasmas
Abnormal transition of the electron energy distribution with excitation of the second harmonic in low-pressure radio-frequency capacitively coupled plasmas
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The self-excited second harmonic in radio-frequency capacitively coupled plasma was significantly enhanced by adjusting the external variable capacitor.At a lower pressure of 3 Pa,the excitation of the second harmonic caused an abnormal transition of the electron energy probability function,resulting in abrupt changes in the electron density and temperature.Such changes in the electron energy probability function as well as the electron density and temperature were not observed at the higher pressure of 16 Pa under similar harmonic changes.The phenomena are related to the influence of the second harmonic on stochastic heating,which is determined by both amplitude and the relative phase of the harmonics.The results suggest that the self-excited high-order harmonics must be considered in practical applications of low-pressure radio-frequency capacitively coupled plasmas.
radio-frequencycapacitively coupled plasmaharmonicsthe electron energy probability function
余乐怡、陆文琪、张丽娜
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Key Laboratory of Materials Modification by Laser,Ion and Electron Beams (Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,People's Republic of China
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