介绍了 500 mm 口径大抽速氙气泵的抽气原理、结构、一级冷板优化设计和抽速测试.通过氙气和氮气抽气速率测试对比,该款大抽速氙气泵的氙气抽速与氮气抽速相近,实际抽速高达10 500 L/s,抽氙速率提高了 1倍以上.大抽速氙气泵除了具有较优的抽氙性能,同时具备常规低温泵所有性能.该泵可一泵多用,为客户节约了采购和安装成本.
Study on optimal design of xenon air pump with high pumping speed
The pumping principle,structure,optimization design of the first-stage cold plate and pumping speed test of the 500 mm caliber high-speed xenon cryopump were introduced.Through the test comparison of xenon and nitrogen pumping rates,the xenon and nitrogen speed of this high-pumping xenon pump are similar.The actual performance of pumping xenon speed is up to 10 500 Us,which is twice that of conventional cryopumps for xenon.In addition to the excellent xenon pumping perform-ance,the high-speed xenon pump has all the performance of conventional cryopumps.The pump can be used for multiple purpo-ses,saving procurement and installation costs for customers.
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