DN800 cryopump with 800 mm diameter was needed by certain type of vacuum environment experimental device to realize the evacuation demand of large pumping speed and oil-free clean.It used two GM cryocoolers as the refrigeration source and did not need cryogenic liquid auxiliary cooling.The two GM cryocoolers could provide cooling capacities of 220 W@77 K and 12 W@16 K,which exceeded the system heat load of the cryopump,and there was a certain rich cooling capacity.In the design of pump shell,barrier,adsorption array and other key components of the cryopump,according to the theoretical formu-la of cryopump,the structural strength,index requirements and working margin,finally through the ANSYS simulation analysis software,the simulation results confirm that the design of barrier and adsorption array meet the work requirements.The final ex-perimental results of cooling time and pumping speed confirm that DN800 cryopump can meet the requirements of technical indi-cators.The measured minimum temperature of DN800 cryopump is 10.1 K,the measured cooling time is 195 min,the measured speed of nitrogen is 30 000 L/s,the measured speed of argon is 24 000 L/s,and the measured speed of hydrogen is 54 000 L/s.
NETL
NSTL
万方数据
