摘要
在大规模集成电路制程中,六氟丁二烯作为蚀刻剂使用.与传统蚀刻剂相比,六氟丁二烯蚀刻速率更快、选择性和深宽比更高、环境更友好.对六氟丁二烯的合成方法进行归纳和总结,为高纯六氟丁二烯的研发和生产提供参考.
Abstract
In large-scale integrated circuit manufacturing processes,hexafluorobutadiene is used as an etchant.Compared to traditional etchants,hexafluorobutadiene has faster etching rates,higher selectivity,depth to width ratio,and is more environmentally friendly.This article summarizes the synthesis methods of hexafluorobutadiene,providing reference for the development and production of high-purity hexafluorobutadiene.
维普
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