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超纯氩的纯化与检测

Purification and Detection of Ultrapure Argon

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介绍了氩气纯化器的纯化工艺和超纯氩的检测方法,对超纯氩检测的结果表明,该纯化工艺满足超纯氩生产要求,该检测方法具有检测可靠性.
The purification process of argon purifier and the detection method of ultrapure argon are introduced.The detec-tion results of ultra-pure argon show that the purification process meets the requirement for ultrapure argon production and the detection method has detection reliability.

ultrapure argonpurifiergetter

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中昊光明化工研究设计院有限公司,辽宁 大连 116308

超纯氩 纯化器 吸气剂

2024

低温与特气
光明化工研究设计院

低温与特气

影响因子:0.232
ISSN:1007-7804
年,卷(期):2024.42(2)
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