八氟环戊烯制备与纯化技术研究进展
Research Progress in Preparation and Purification Technology of Octafluorocyclopentene
刘胜利 1李笑艳 1何红振 1许福胜 1袁胜芳 1张金彪1
作者信息
- 1. 昊华气体有限公司,河南 洛阳 471000
- 折叠
摘要
八氟环戊烯性质稳定,可用于合成有机光致变色材料和电子材料,也可作为刻蚀剂与清洗剂应用于半导体制造过程中.目前工业上成熟的八氟环戊烯合成路线为环戊烯或环戊烯的氟氯化合物与碱金属氟化物反应,纯化路线为精馏、吸附或膜分离等方法及各方法的耦合.重点对八氟环戊烯的制备与纯化技术进行了总结,简述了八氟环戊烯的应用.
Abstract
Octafluorocyclopentene is a stable substance.It can be used to synthesize organic photochromic materials and e-lectronic materials,and can also be used as etching agents and cleaning agents in semiconductor manufacturing processes.At present,the commercially mature preparation route of octafluorocyclopentene is through the reaction of cyclopentene or cyclopentene fluorinated compounds with alkali metal fluoride,and the purification route is through distillation,adsorption or membrane separation and the coupling of various methods.The synthesis and purification technologies of octafluorocyclo-pentene are summarized,and the application of octafluorocyclopentene is briefly described,which has certain reference val-ue and guiding significance.
关键词
八氟环戊烯/制备/纯化/应用Key words
octafluorocyclopentene/preparation/purification/application引用本文复制引用
出版年
2024
NETL
NSTL
万方数据