Electronic-grade hydrogen chloride is widely used in the vapor phase polishing processes and epitaxial base cor-rosion processes in the semiconductor industry.The requirement for the purity of electric-grade hydrogen chloride has be-come the increasingly stringent as the decrease of chip process,which creates new challenges to the purification technology of electronic-grade hydrogen chloride.It summarizes the purification techniques to hydrogen chloride at current stage inclu-ding condensation,absorption,distillation,adsorption,chemical conversion,membrane separation and precision filtration.The multiple purification techniques need to be combined to obtain electronic-grade hydrogen chloride.
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