摘要
八氟丙烷具有良好的热稳定性和化学稳定性,主要用作半导体器件制作过程中的等离子体刻蚀气和清洗气.对八氟丙烷的制备和纯化工艺进行了总结分析,八氟丙烷的制备方法有直接氟化、电解氟化、氟氯烷烃的氟化、六氟丙烯的氟化加成等,纯化方法有精馏法、吸附法、精馏+吸附法、杂质转化法和膜分离法等,对于高纯度电子级八氟丙烷的制备和纯化工艺开发有一定的指导意义.
Abstract
Octafluoropropane has good thermal and chemical stability and is mainly used as plasma etching gas and cleaning gas in semiconductor device manufacturing process.The preparation and purification process of octafluoropropane were sum-marized and analyzed.The preparation methods of octafluoropropane are direct fluorination,electrolytic fluorination,fluori-nation of alkanes containing fluorine and chlorine,fluorination addition of hexafluoropropylene,etc.The purification meth-ods include distillation,adsorption,distillation+adsorption,impurity conversion and membrane separation,etc.,which has certain guiding significance for the preparation and purification process development of high purity electronic grade oc-tafluoropropane.
维普
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