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高纯气体最低检测限的研究

Research on the Minimum Detection Limit for Measuring High-purity Gases

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采用多组分配气系统稀释高纯气体中的永久气体组分,得到不同浓度的标准气体,采用脉冲氦离子化气相色谱仪(GC-PDD)进行检测,实验结果表明,PDD具有高灵敏度和良好的线性度,可以实现超低浓度样品的检测,进一步验证了 PDD的实际最低检测限可达到ng/g(10-9)水平.
The multi-group gas distribution system was used to dilute the permanent gas components in the high-purity gas,and the standard gases of different concentrations obtained were detected by pulsed helium ionized gas chromatograph(GC-PDD).The experimental results show that PDD has high sensitivity and good linearity,which can realize the detection of ultra-low-concentration samples,and further verifies that the actual minimum detection limit of PDHID can reach the level of ng/g(10-9).

multi-group gas distribution systempulsed discharge helium ionization detectordetection limitsensitivity

唐峰、党晓婧、郑择、郁光、方华

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深圳供电局有限公司,广东深圳 518000

上海华爱色谱分析技术有限公司,上海 200940

多组分配气系统 脉冲放电氦离子化检测器 检测限 灵敏度

2024

低温与特气
光明化工研究设计院

低温与特气

影响因子:0.232
ISSN:1007-7804
年,卷(期):2024.42(4)