The determination of fluorine gas content in fluorine gas mixture was completed by ultraviolet absorption method and gas chromatograph analysis method,sampling system was adopted,the analysis process was described,and the advan-tages and disadvantages of using two analysis methods to analyze fluorine gas content were compared.The results show that the ultraviolet absorption method has the characteristics of good repeatability,wide linear range,short analysis time and easy operation.
关键词
紫外吸收法/气相色谱仪/氟气混合气/电子特气
Key words
ultraviolet absorption method/gas chromatograph/fluorine gas mixture/electronic specialty gas
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