In order to ensure the quality of high-purity electronic special gas reference material,the detection method of trace impurities is established,which is of great significance to the research and development and production of gas.Trace impurities in high-purity electronic special gas are mainly trace water,trace oxygen,carbon oxygen and hydrocarbons,and special impurities are mainly hydrogen fluoride and various metal elements.The analysis methods of different trace impuri-ties are discussed,the measurement accuracy of trace impurities can be improved by overcoming the interference factors in the measurement process,and the development prospect of analysis and detection technology is pointed out.
high-purity electronic special gastrace impuritiesanalysis methodsgas chromatography
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