Progress in Preparation and Purification of Electronic Grade Carbonic Difluoride
As a kind of clean and environmentally friendly gas,carbonic difluoride has important applications in semicon-ductor etching and cleaning.This review focuses on the preparation and purification technology of electronic grade carbonic difluoride.First,three types of preparation technology of fluorination,oxidation and catalytic cracking process are intro-duced,and then the application of low temperature distillation,chemical reaction method and membrane separation method in the purification process of electronic grade carbonic difluoride are briefly described.
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