The basic physicochemical properties and application fields of phosphorus trifluoride(PF3)were described,and the research progress on the synthesis methods of phosphorus trifluoride was mainly introduced.Phosphorus trifluoride is a colorless and odorless gas at room temperature and pressure,with a wide application prospect,especially in the fields of e-lectronics industry and semiconductor manufacturing.There are currently multiple reported preparation methods for PF3.This article summarizes and categorizes reactions according to their reaction types,including elemental reaction method,acid assisted metathesis reaction method,and salt metathesis reaction method.Among them,the salt metathesis reaction method is the most promising method for preparing PF3.
关键词
三氟化磷/合成/电子特气
Key words
phosphorus trifluoride/synthesis/electronic specialty gas
维普
万方数据