Fluoride and light components in high purity krypton and xenon products are the main impurities which affect the high purity of products,and are also the factors which restrict the production of krypton and xenon distillation.The impurity purifier takes advantage of the fact that rare gases are not easily adsorbed,and adopts double removal to improve the purity of products and the output of krypton and xenon products.According to the data of one month operation,volume fraction of CF4 in 5N krypton decreased to below 0.01×10-6 and volume fraction of SF6 in xenon decreased to below 0.1×10-6,and the daily output of krypton and xenon increased by 50%～70%.Conclusion:Because of the selective adsorption of rare ga-ses and other gases by the purifier,the stability of krypton and xenon product quality is effectively improved.
万方数据
维普
