Micro-nano optoelectronic devices play an important role in the filed optical communication,optical information processing, biological sensor, and high performance computing and so on. The fiber-waveguide testing platform is used to analyze the properties of micro-nano devices including crosstalk,insertion loss,cou-pling efficiency etc.It consists of a tunable laser,a polarization controller,a lensed fiber,x/y/z axis step-motor, optical power meter and so on,whose precision can reach up to 50nm.Using the fiber-waveguide testing system to analyze the coupling efficiency of subwavelength grating and the loss of waveguide, we propose a testing method,which can be used in optical communication and optical interconnect network.
fiber-waveguide testing systemwaveguideSOIcrosstalkinsertion loss