The vacuum electromagnetic induction melting technology was adopted to smelt TiAlSi ternary alloy with simple substance raw materials.Moreover,the influence of melting process parameters(the sequence of material feeding and stirring time)on the melting products was studied.The melting preparation process of TiAlSi alloy with uniform composition was explored,and the product composition,metallographic structure,phase composition and hardness of the products were analyzed,providing a basis for machining and preparation of TiAlSi cathode target material and laying a foundation for the preparation of TiAlSiN high-performance protective coatings.