Analysis on Characterization of Compositional Changes in TiAlSi Alloy Prepared by Vacuum Electromagnetic Induction Melting
The content of Si element is a key factor affecting the performance of TiAlSiN coatings,and the composition of TiAlSi alloy target material is crucial to the coating composition.In this paper,TiAlSi ternary alloys with different compositions have been melted by the process of vacuum electromagnetic induction melting with different raw material ratios.The changes in the content of various elements before and after the melting process have been studied,and the variation law of Si element content in the melting product with the melting ratio have been analyzed.The correlation among the composition,morphology and phase composition of TiAlSi alloy with different Si element contents have been analyzed,which have provided a basis for the melting,machining and preparation of TiAlSi cathode target materials with quantitative composition,and laid a foundation for the preparation of TiAlSiN coating with specific composition.
vacuum meltingTiAlSi alloycoating for cutting toolSi element