The bidirectional switch is extensively applied in the fields such as state-solid breakers and photovoltaic inverters, and increasing attention is paid to the bidirectional switch of SiC power modules owing to its low power loss and high switching frequency. However, due to the traditional packaging methods for Si power modules, the bidirectional switch of the SiC power module is challenged by the issue of high switching speed. Aimed at the low-inductance packag-ing requirement, a chip-on-chip 3D packaging method is proposed for the bidirectional switch of the SiC power module. The circuit topology and geometric structure of the 3D packaging are given, and the communication loop and parasitic in-ductance of the 3D packaging are analyzed. In addition, the process was designed for the 3D packaging, and a prototype of the bidirectional switch of the SiC power module was fabricated. Experimental results of a double-pulse test verified the feasibility and effectiveness of the proposed 3D packaging for the bidirectional switch of the SiC power module.
关键词
双向开关/SiC功率模块/低寄生电感/3D封装
Key words
Bidirectional switch/SiC power module/low parasitic inductance/3D packaging