电子技术2024,Vol.53Issue(3) :16-18.

连续真空蒸发法制备CsPbBr3薄膜及其X射线探测性能的分析

Analysis of Preparation of CsPbBr3 Thin Films by Continuous Vacuum Evaporation Method and X-ray Detection Performance

汪毅 徐海涛 姚博 方泽波
电子技术2024,Vol.53Issue(3) :16-18.

连续真空蒸发法制备CsPbBr3薄膜及其X射线探测性能的分析

Analysis of Preparation of CsPbBr3 Thin Films by Continuous Vacuum Evaporation Method and X-ray Detection Performance

汪毅 1徐海涛 1姚博 1方泽波1
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作者信息

  • 1. 绍兴文理学院微机电系统浙江省工程研究中心,浙江 312000
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摘要

阐述采用连续蒸发法制备一定厚度的CsPbBr3薄膜并用于X射线探测.研究CsBr层和PbBr2层的厚度比对CsPbBr3薄膜物性的影响.结果表明,在厚度比为0.85时,可获得纯立方相结构的CsPbBr3薄膜,并通过衬底原位加热的方式有效解决薄膜出现龟裂而脱落的问题,同时促进薄膜晶粒的长大.制备的CsPbBr3薄膜X射线探测器的光电流与X射线剂量率之间呈现出良好的线性关系.器件的线性灵敏度达1223μCGy-1cm-2.

Abstract

This paper describes the preparation of CsPbBr3 thin films with a certain thickness using continuous evaporation method and their application in X-ray detection.Study the effect of thickness ratio of CsBr layer and PbBr2 layer on the physical properties of CsPbBr3 thin films.The results indicate that a pure cubic structured CsPbBr3 film can be obtained at a thickness ratio of 0.85,and the problem of film cracking and detachment can be effectively solved by in-situ substrate heating,while promoting the growth of film grains.There is a good linear relationship between the photocurrent and X-ray dose rate of the CsPbBr3 thin film X-ray detector prepared.The linear sensitivity of the device reaches 1 223μ CGy-1cm-2.

关键词

真空蒸发法/CsPbBr3薄膜/X射线探测器

Key words

vacuum evaporation method/CsPbBr3 thin film/X-ray detector

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基金项目

国家自然科学基金(11905133)

浙江省自然科学基金(LQ19F040002)

浙江省基础公益研究计划(LGG21F050001)

出版年

2024
电子技术
上海市电子学会,上海市通信学会

电子技术

影响因子:0.296
ISSN:1000-0755
参考文献量5
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