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集成电路制造中Pad Crystal成因与改善措施的分析

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阐述集成电路芯片的复杂制作过程.在12英寸线的芯片制造中,在制品通常有几百甚至上千个步骤,可分为前道工艺、后道封装工艺.Pad工艺位于前道工艺的尾部,Pad主要功能用于和后道管脚线连接.为此,从工艺机理出发,通过实验,探讨集成电路中Pad Crystal成因及改善,提出Pad Crystal发生后的rework方法,并已实际应用.
Analysis of the Causes and Improvement Measures of Pad Crystal in Integrated Circuit Manufacturing
This paper describes the complex manufacturing process of integrated circuit chips.In the manufacturing of 12 inch chips,there are usually hundreds or even thousands of steps in the process,which can be divided into pre process and post packaging process.The Pad process is located at the end of the previous process,and its main function is to connect with the pins of the subsequent process.Therefore,starting from the process mechanism,it explores the causes and improvements of Pad Crystal in integrated circuits through experiments,proposes rework methods after Pad Crystal occurrence,and has been practically applied.

integrated circuit manufacturingprocess mechanismPad Crystal

陈菊英、何亮亮、吕亚冰

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上海华力微电子有限公司,上海 200123

集成电路制造 工艺机理 Pad Crystal

2024

电子技术
上海市电子学会,上海市通信学会

电子技术

影响因子:0.296
ISSN:1000-0755
年,卷(期):2024.53(6)