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QCM微粒传感器中的高压静电吸附结构设计与性能评估

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阐述微型PM颗粒物检测器的设计,提出基于石英晶体压电效应的检测方法.该方法采用QCM微粒检测技术,设计并研发微型颗粒物检测器电路控制芯片,建立多颗粒传感解耦模型,搭建QCM电路仿真实验系统,实现利用QCM传感器对空气PM值的检测.
Design and Performance Evaluation of High Voltage Electrostatic Adsorption Structure in QCM Particle Sensor
This paper describes the design of a miniature PM particle detector and proposes a detection method based on the piezoelectric effect of quartz crystals.This method adopts QCM particle detection technology,designs and develops a micro particle detector circuit control chip,establishes a multi particle sensing decoupling model,builds a QCM circuit simulation experimental system,and realizes the detection of air PM values using QCM sensors.

high-voltage electrostatic adsorption structureQCM particle sensing technologypulse counting method

游亿哲、王壮壮、高煊

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重庆交通大学,重庆 400074

高压静电吸附结构 QCM微粒传感技术 脉冲计数法

2024

电子技术
上海市电子学会,上海市通信学会

电子技术

影响因子:0.296
ISSN:1000-0755
年,卷(期):2024.53(6)