Design and Performance Evaluation of High Voltage Electrostatic Adsorption Structure in QCM Particle Sensor
This paper describes the design of a miniature PM particle detector and proposes a detection method based on the piezoelectric effect of quartz crystals.This method adopts QCM particle detection technology,designs and develops a micro particle detector circuit control chip,establishes a multi particle sensing decoupling model,builds a QCM circuit simulation experimental system,and realizes the detection of air PM values using QCM sensors.