电子技术2024,Vol.53Issue(6) :36-37.

QCM微粒传感器中的高压静电吸附结构设计与性能评估

Design and Performance Evaluation of High Voltage Electrostatic Adsorption Structure in QCM Particle Sensor

游亿哲 王壮壮 高煊
电子技术2024,Vol.53Issue(6) :36-37.

QCM微粒传感器中的高压静电吸附结构设计与性能评估

Design and Performance Evaluation of High Voltage Electrostatic Adsorption Structure in QCM Particle Sensor

游亿哲 1王壮壮 1高煊1
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作者信息

  • 1. 重庆交通大学,重庆 400074
  • 折叠

摘要

阐述微型PM颗粒物检测器的设计,提出基于石英晶体压电效应的检测方法.该方法采用QCM微粒检测技术,设计并研发微型颗粒物检测器电路控制芯片,建立多颗粒传感解耦模型,搭建QCM电路仿真实验系统,实现利用QCM传感器对空气PM值的检测.

Abstract

This paper describes the design of a miniature PM particle detector and proposes a detection method based on the piezoelectric effect of quartz crystals.This method adopts QCM particle detection technology,designs and develops a micro particle detector circuit control chip,establishes a multi particle sensing decoupling model,builds a QCM circuit simulation experimental system,and realizes the detection of air PM values using QCM sensors.

关键词

高压静电吸附结构/QCM微粒传感技术/脉冲计数法

Key words

high-voltage electrostatic adsorption structure/QCM particle sensing technology/pulse counting method

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出版年

2024
电子技术
上海市电子学会,上海市通信学会

电子技术

影响因子:0.296
ISSN:1000-0755
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