电子技术2024,Vol.53Issue(6) :348-350.

半导体晶圆静电吸盘表面陶瓷材料的制备方法分析

Analysis of Preparation Methods for Ceramic Materials on the Surface of Semiconductor Wafer Electrostatic Suction Cups

周磊 郑磊
电子技术2024,Vol.53Issue(6) :348-350.

半导体晶圆静电吸盘表面陶瓷材料的制备方法分析

Analysis of Preparation Methods for Ceramic Materials on the Surface of Semiconductor Wafer Electrostatic Suction Cups

周磊 1郑磊2
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作者信息

  • 1. 明德润和机械制造(天津)有限公司,天津 300350
  • 2. 珠海和泽科技有限公司,广东 519090
  • 折叠

摘要

阐述一种优化半导体晶圆静电吸盘表面陶瓷材料的制备方法,在制作过程中结合计算机的深度学习以及神经网络技术,优化煅烧效果,提高煅烧效率和半导体晶圆静电吸盘表面陶瓷的制备质量.

Abstract

This paper describes a method for optimizing the preparation of ceramic materials on the surface of semiconductor wafer electrostatic suction cups.During the production process,computer deep learning and neural network technology are combined to optimize the calcination effect,improve calcination efficiency,and enhance the preparation quality of ceramic materials on the surface of semiconductor wafer electrostatic suction cups.

关键词

晶圆静电吸盘/陶瓷材料/图像编码器/硅片/金属材料

Key words

wafer electrostatic suction cup/ceramic materials/image encoder/silicon wafer/metal materials

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出版年

2024
电子技术
上海市电子学会,上海市通信学会

电子技术

影响因子:0.296
ISSN:1000-0755
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