This paper describes that magnetron sputtering coating equipment is one of the two main types of vacuum coating equipment used in the production of photovoltaic heterojunction cells,extensively applied in the creation of TCO thin films for heterojunction cells.This article conducts research based on the structure and technological process of magnetron sputtering coating equipment.It provides an introduction to the hardware development and control schemes,and ultimately concludes with the completion of the design and verification.
关键词
磁控溅射/真空镀膜/光伏异质结电池/TCO薄膜
Key words
magnetron sputtering/vacuum coating/photovoltaic heterojunction cells/TCO thin films
维普
万方数据