[Objective]To address current engineering challenges such as poor stability and accuracy,limited cov-erage,and high costs associated with soil landslide displacement monitoring,a novel method based on microelectro-mechanical system(MEMS)sensor technology is proposed.[Methods]By considering the kinematic characteris-tics of slope deformation,a time-domain acceleration integration algorithm is designed to correct random and sys-tematic errors in the acceleration data collected by MEMS sensor.To verify the effectiveness and practicality of this displacement monitoring method,two indoor landslide model tests and corresponding finite element simulation cal-culations were designed and conducted.MEMS technology was used to monitor the internal displacement of the soil for the test slopes,and the results were compared with the the finite element simulation outputs to evaluate the ac-curacy and reliability of the algorithm.[Results]The findings indicate that the MEMS-based soil landslide dis-placement monitoring achieved a minimum average relative error of 0.09%in the horizontal direction and 0.50%in the vertical direction,demonstrating high accuracy and suitability for practical engineering applications.[Conclu-sion]The research results provide a novel approach to soil landslide monitoring and provides a theoretical founda-tion for the integrating MEMS sensors in landslide and slope safety engineering.