首页|基于柔性基的高灵敏度无损光纤压力传感器

基于柔性基的高灵敏度无损光纤压力传感器

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为了简化光纤压力传感器的制作方法,降低制作成本,提出了一种柔性基应变式无损光纤压力传器.将未进行过任何处理的单模光纤嵌入在两片柔性的聚二甲基硅氧烷(PDMS)薄膜中,制作成"三明治"结构压力传感器.采用光频域反射计(OFDR)技术进行解调,测试传感器在不同压力下的光谱漂移与光纤的微应变的关系.实验结果表明:在受力面积为2.375 mm2,压力范围0~5 kgf(0~20 MPa)时,传感器的灵敏度达到194/kgf,是裸单模光纤的6.47倍,同时压力测量范围提高5倍.在0~2 kgf(0~8 MPa)范围内传感器具有很高的重复性与线性度.另外进行了分布式压力测试,证实传感器输出响应明显,空间分辨率较高.
High Sensitivity and Lossless Fiber Optic Pressure Sensor Based on Flexible Base
A flexible lossless fiber optic pressure sensor of stain has been proposed. It can simplify the processing method and reduce cost of the fabrication. The single-mode optical fiber without any processing was embedded in two flexible polydimethylsiloxane( PDMS) films to form a pressure sensor with"sandwich" structure. Demodulation tests were carried out by using the optical frequency domain reflectometer ( OFDR ) technology. The relationship between the spectrum drift and the micro-strain of the optical fiber under different pressure was measured. And the stress area of the sensor in the experiment is 2.375 mm2 . The experimental results show that the proposed sensor has a sensitivity of 194/kgf,which is 6.47 times higher than bare single-mode optical fiber in the range of 0 kgf to 5 kgf (0~20 MPa). Compared with bare single-mode optical fiber,its measuring range is increased by 5 times. And the sensor has a good repeatability and linearity when varying pressures were applied ranging from 0 kgf to 2 kgf( 0~8 MPa) . In addition,the distributed pressure test proves that the output response of the sensor is great and the sensor has a high spatial resolution.

fiber optic pressure sensorsingle-mode optical fiberpolydimethylsiloxane(PDMS)substrateoptical frequency domain reflectometer(OFDR)

隋丹丹、张会新、洪应平、崔凯、胡彦君、安国文、张利平

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中北大学电子测试技术国家重点实验室,太原030051

中北大学仪器科学与动态测试教育部重点实验室,太原030051

北京遥测技术研究所,北京100076

光纤压力传感器 单模光纤 聚二甲基硅氧烷(PDMS)基底 光频域反射计

国家杰出青年科学基金

51705475

2020

电子器件
东南大学

电子器件

CSTPCD北大核心
影响因子:0.569
ISSN:1005-9490
年,卷(期):2020.43(3)
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