Based on the traditional RC oscillator structure,an on-chip integrated high precision oscillator circuit is proposed,which uses a temperature compensation circuit to perform temperature compensation on the charging current.The output frequency is corrected u-sing a capacitance calibration circuit.The delay elimination circuit is adopted to reduce the delay of the comparator.Finally,the re-quirements of high precision and high stability of the oscillator are achieved.Based on CSMC's 0.18 μm BCD process,under the condi-tions of voltage being 4 V,temperature being 27℃,and TT,the output frequency is 2 MHz,and the duty cycle is 50%.Through fre-quency calibration,the accuracy can finally reach±0.2%.The oscillator has the characteristics of high precision,stability,small size and easy integration,which can meet the needs of most on-chip integrated chips.