Research on integrated optimization scheduling of lossless high speed handling equipment for semiconductor wafer
To achieve a compact,scientific and efficient scheduling of semiconductor wafer handling equipment,research is conducted on the integrated optimization scheduling method for non-destructive high-speed semiconductor wafer handling equipment.Based on the situation of non-destructive high-speed transportation and connection of semiconductor wafers,considering the characteristics of large task volume and complex process in the process of non-destructive high-speed transportation of semiconductor wafers,an integrated optimization scheduling model for semiconductor wafer non-destructive high-speed transportation equipment is constructed with the objective function of minimizing the overall time interval and the overall transportation time,and relevant constraint functions of the objective function are set.For the scheduling model of double objective function,the particle swarm optimization algorithm is used to solve the multi-objective function.Considering the poor convergence efficiency of the standard particle swarm optimization algorithm in the process of solving,the asynchronous learning factor is used to optimize the standard particle swarm optimization algorithm to improve the rate of convergence and global search performance of the algorithm.The experimental results show that the method has a fast efficiency in solving the objective function,and minimizes the handling time while ensuring the completion of the handling task.
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