The fabrication,packaging,and application of β-Ga2O3-based devices is limited by their mechanical properties,while the basic understanding of the mechanical deformation mechanism of the(100)β-Ga2O3 is still lacking.Herein,we presented a systematic research on the mechanical behaviors of(100)β-Ga2O3 nanopillars.The nanopillars were fractured easily along the(100)B plane with a fracture stress from 314.1-615.1 MPa.Meanwhile,the effect of different aspect ratios and diameters on the deformation behavior was further discussed.The plasticity in the small-sized(100)β-Ga2O3 was also investigated.The result showed that β-Ga2O3 nanopillars exhibited a brittle fracture along the(100)B plane when the aspect ratio was larger than 2.In contrast,when the aspect ratio was lower than 2,the nanopillars(d＜200 nm)showed the brittle to ductile transition,as manifested by the initial slipping along the(201)plane and the fracture along the(100)B plane.Finally,the effect of the crystallographic orientation on the plasticity of small-sized nanopillars was discussed,which lays the foundation for the potential application of the extremely brittle β-Ga2O3 in nanodevices.
关键词
β-Ga2O3/脆韧转变/力学研究/透射电子显微镜
Key words
β-Ga2O3/brittle-to-ductile transition/mechanical deformation mechanism/transmission electron microscopy
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