首页|扫描电镜中透射-反射式STEM明场成像装置的研制及应用

扫描电镜中透射-反射式STEM明场成像装置的研制及应用

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本文研制了一套透射-反射式扫描透射(STEM)明场成像装置,该装置使用背散射电子探头接收经过铂片反射的透射电子信号,可安装在FEI Quanta FEG系列扫描电镜中实现STEM明场成像.分别以埃洛石、Au@ZIF-8 纳米颗粒和喷金乳胶标样验证自制STEM明场成像装置的实用性.结果表明:埃洛石STEM明场像的衬度与透射电镜中STEM明场像一致,管腔和管壁具有明显的衬度差异,可以清晰辨识管腔结构;在Au@ZIF-8 纳米颗粒的STEM明场像中,Au颗粒衬度较暗,ZIF-8 衬度较亮,通过两者之间的衬度差异可以观察到核壳结构;喷金乳胶标样上纳米金颗粒之间可识别的最小距离为 2.03 nm,进一步验证了自制STEM明场成像装置具有较高的分辨率.
Development and application of scanning transmission electron microscopy bright field imaging device
A transmission-reflection scanning transmission electron microscopy(STEM)bright field(BF)imaging device was developed.The device used a back-scattering electron detector(BSED)to receive transmission electron signals reflected by platinum plates,and was installed in FEI Quanta FEG series scanning electron microscopy to realize the STEM-BF imaging.The practicability of self-made STEM-BF imaging device was verified by checking halloysite,Au@ZIF-8 nanoparticles and Au nanoparticles.The result showed that the contrast of STEM-BF image of halloysite in SEM was consistent with that of STEM-BF image in TEM.The lumen and wall had obvious contrast difference,clearly identifying the lumen structure.Revealed by the STEM-BF image of Au@ZIF-8 nanoparticles,the contrast of Au particles was darker and that of ZIF-8 was brighter,and the core-shell structure was observed through the contrast difference.The minimum discernible distance between Au nanoparticles on carbon film of standard sample was 2.03 nm,further demonstrating that the self-made STEM-BF imaging device had a high resolution.

scanning electron microscopy(SEM)scanning transmission electron microscopy(STEM)bright field(BF)imageimaging deviceimage contrast

赵学平、侯小虎、刘飞、梁绍波、崔晓明、白朴存

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内蒙古工业大学 测试中心,内蒙古 呼和浩特 010051

内蒙古工业大学 材料科学与工程学院,内蒙古 呼和浩特 010051

扫描电镜 扫描透射电子显微镜 明场像 成像装置 图像衬度

国家自然科学基金资助项目国家自然科学基金资助项目内蒙古自治区直属高校基本科研业务费项目内蒙古自治区直属高校基本科研业务费项目内蒙古自治区直属高校基本科研业务费项目

6226401311762014JY20220171JY20220144JY20220184

2024

10.3969/j.issn.1000-6281.2024.02.011

电子显微学报
中国物理学会

电子显微学报

CSTPCD北大核心
影响因子：0.431
ISSN：1000-6281
年,卷(期)：2024.43(2)
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