电子显微学报2024,Vol.43Issue(2) :208-214.DOI:10.3969/j.issn.1000-6281.2024.02.011

扫描电镜中透射-反射式STEM明场成像装置的研制及应用

Development and application of scanning transmission electron microscopy bright field imaging device

赵学平 侯小虎 刘飞 梁绍波 崔晓明 白朴存
电子显微学报2024,Vol.43Issue(2) :208-214.DOI:10.3969/j.issn.1000-6281.2024.02.011

扫描电镜中透射-反射式STEM明场成像装置的研制及应用

Development and application of scanning transmission electron microscopy bright field imaging device

赵学平 1侯小虎 1刘飞 1梁绍波 2崔晓明 2白朴存2
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作者信息

  • 1. 内蒙古工业大学 测试中心,内蒙古 呼和浩特 010051
  • 2. 内蒙古工业大学 材料科学与工程学院,内蒙古 呼和浩特 010051
  • 折叠

摘要

本文研制了一套透射-反射式扫描透射(STEM)明场成像装置,该装置使用背散射电子探头接收经过铂片反射的透射电子信号,可安装在FEI Quanta FEG系列扫描电镜中实现STEM明场成像.分别以埃洛石、Au@ZIF-8 纳米颗粒和喷金乳胶标样验证自制STEM明场成像装置的实用性.结果表明:埃洛石STEM明场像的衬度与透射电镜中STEM明场像一致,管腔和管壁具有明显的衬度差异,可以清晰辨识管腔结构;在Au@ZIF-8 纳米颗粒的STEM明场像中,Au颗粒衬度较暗,ZIF-8 衬度较亮,通过两者之间的衬度差异可以观察到核壳结构;喷金乳胶标样上纳米金颗粒之间可识别的最小距离为 2.03 nm,进一步验证了自制STEM明场成像装置具有较高的分辨率.

Abstract

A transmission-reflection scanning transmission electron microscopy(STEM)bright field(BF)imaging device was developed.The device used a back-scattering electron detector(BSED)to receive transmission electron signals reflected by platinum plates,and was installed in FEI Quanta FEG series scanning electron microscopy to realize the STEM-BF imaging.The practicability of self-made STEM-BF imaging device was verified by checking halloysite,Au@ZIF-8 nanoparticles and Au nanoparticles.The result showed that the contrast of STEM-BF image of halloysite in SEM was consistent with that of STEM-BF image in TEM.The lumen and wall had obvious contrast difference,clearly identifying the lumen structure.Revealed by the STEM-BF image of Au@ZIF-8 nanoparticles,the contrast of Au particles was darker and that of ZIF-8 was brighter,and the core-shell structure was observed through the contrast difference.The minimum discernible distance between Au nanoparticles on carbon film of standard sample was 2.03 nm,further demonstrating that the self-made STEM-BF imaging device had a high resolution.

关键词

扫描电镜/扫描透射电子显微镜/明场像/成像装置/图像衬度

Key words

scanning electron microscopy(SEM)/scanning transmission electron microscopy(STEM)/bright field(BF)image/imaging device/image contrast

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基金项目

国家自然科学基金资助项目(62264013)

国家自然科学基金资助项目(11762014)

内蒙古自治区直属高校基本科研业务费项目(JY20220171)

内蒙古自治区直属高校基本科研业务费项目(JY20220144)

内蒙古自治区直属高校基本科研业务费项目(JY20220184)

出版年

2024
电子显微学报
中国物理学会

电子显微学报

CSTPCDCSCD北大核心
影响因子:0.431
ISSN:1000-6281
参考文献量9
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