A transmission-reflection scanning transmission electron microscopy(STEM)bright field(BF)imaging device was developed.The device used a back-scattering electron detector(BSED)to receive transmission electron signals reflected by platinum plates,and was installed in FEI Quanta FEG series scanning electron microscopy to realize the STEM-BF imaging.The practicability of self-made STEM-BF imaging device was verified by checking halloysite,Au@ZIF-8 nanoparticles and Au nanoparticles.The result showed that the contrast of STEM-BF image of halloysite in SEM was consistent with that of STEM-BF image in TEM.The lumen and wall had obvious contrast difference,clearly identifying the lumen structure.Revealed by the STEM-BF image of Au@ZIF-8 nanoparticles,the contrast of Au particles was darker and that of ZIF-8 was brighter,and the core-shell structure was observed through the contrast difference.The minimum discernible distance between Au nanoparticles on carbon film of standard sample was 2.03 nm,further demonstrating that the self-made STEM-BF imaging device had a high resolution.
关键词
扫描电镜/扫描透射电子显微镜/明场像/成像装置/图像衬度
Key words
scanning electron microscopy(SEM)/scanning transmission electron microscopy(STEM)/bright field(BF)image/imaging device/image contrast