Traditional scanning electron microscopes are limited to capturing two-dimensional images,which hinders their ability to accurately describe surface morphology and obtain quantitative height information.To overcome this limitation and achieve three-dimensional morphology characterization,an improved acquisition system was developed.This system increased the number of channels to control a four-quadrant distributed backscatter electron detector group,enabling the capture of image data under single view and multi angle"light sources".By applying the photometric method within the 3D imaging algorithm,the system achieved 3D reconstruction.This article presents the design of an analog voltage signal acquisition and generation card based on the STM32 series microcontroller.Additionally,a software system for SEM image acquisition was developed using the QT platform,facilitating multi-channel image signal acquisition and processing.The 3D imaging capability of the system was tested using grating standards,yielding a heigh reconstruction error of 26.7％.
关键词
扫描电子显微镜/三维成像/图像采集/成像系统
Key words
scanning electron microscopy/3D imaging/image acquisition/imaging system
维普
万方数据