The dual beam system,combining FIB and SEM,offers high-precision micro-nano processing and ultra-high spatial resolution imaging.The application of binocular stereo vision for 3D reconstruction at the micro-nano scale is crucial for guiding the processing of micro-nano materials.This paper proposed a 3D reconstruction scheme for FIB-SEM double beam system image based on binocular vision.Depth information of the sample surface was measured using binocular vision combined with image processing technology.Experimental result demonstrated that this method significantly enhanced the accuracy of surface depth information for micro and nano samples,providing a novel approach to 3D construction of SEM images and a robust foundation for precise processing with the FIB-SEM system.
维普
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