Electron microscopy instruments are essential high-end scientific tools used for micro-nano observation and precision processing.Evaluating the quality of electron beams is a critical concern for both instrument developers and users.With the variety of electron microscopy instruments available,evaluation method for electron beam quality can differ significantly depending on the applications.Thus,establishing a standardized method for evaluating electron beam quality is critical for the development and application of electron microscopy instruments.In this paper,we analyzed electron beam quality parameters such as beam current,beam spot,beam density,and electron gun brightness.We categorized beam current and beam spot as direct evaluation parameters,while beam density and electron gun brightness are defined as the basic evaluation parameters.We reviewed the characteristics of different test method for these parameters,generalizing and comparing different evaluation method.Additionally,we summarized and analyzed the electron optical transfer function as a comprehensive evaluation method.This paper aims to provide a reference for establishing standardized evaluation standards and testing method of electron beam quality.
关键词
电子显微类仪器/电子束品质/评价参数/测试方法
Key words
electron microscopy instruments/electron beam quality/evaluation parameters/measurement methods
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