Flexible capacitive pressure sensor based on hollow microcolumn dielectric layer
A flexible capacitive pressure sensor using a hollow micro column dielectric layer was proposed.The hollow micro column dielectric layer of PDMS and BaTiO3 composite material was prepared by reverse molding,and the array electrode was made by screen printing the conductive silver paste on PET film.The experimental results show that the sensitivities of the sensor are0.498 kPa-1,0.026 kPa-1,and 0.008 kPa-1 in the pressure range of 0-5 kPa,5-50 kPa,and 50-200 kPa,respectively.The minimum detection pressure can reach 35 Pa,and it shows stability in 1000 times repeated pressure experiments and has a fast response speed(about 134 ms).The preparation method of this sensor is simple and efficient,with low production cost and convenience for large-scale preparation.At the same time,the sensor has excellent performance in accuracy,stability,flexibility,and can be applied in fields such as wearable electronic devices and intelligent robots.
万方数据
维普
