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基于镓基液态金属的电容式柔性压力传感器

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旨在设计并测试一种基于镓基液态金属的电容式柔性压力传感器.该传感器由镓基液态金属镓铟锡合金(Galinstan)、炭黑(CB)以及聚二甲基硅氧烷(PDMS)以牺牲模板法制作传感器介电层,同时通过丝网印刷技术将镓基液态金属共晶镓铟合金(EGaIn)印刷于普通织物上制备传感器电极.完成传感器封装后,对传感器进行各项传感性能的测试.测试结果表明,该传感器具备较高灵敏度(0.18 kPa-1),低迟滞性,快速响应时间(140 ms)及恢复时间(180 ms),并展现出优良的循环耐久性和稳定性.此外,还探讨了该传感器在监测人体运动,如自行车踏频监测和步频监测等方面的潜在应用,证明其在运动分析和健康监测领域的有效性.通过这些实验和分析,证实了该传感器作为一种新型柔性压力传感器的可行性和应用潜力,为未来的研究和应用提供了有价值的参考.
Flexible capacitive pressure sensor based on gallium based liquid metal
This study focuses on the development and evaluation of a capacitive flexible pressure sensor based on gallium-based liquid metal.The sensor was constructed using a gallium-indium-tin alloy known as Galinstan,combined with carbon black(CB)and polydimethylsiloxane(PDMS)to form the dielectric layer via sacrificial template methodology.Additionally,the electrodes for the sensor were created by screen-printing a gallium-based liquid metal eutectic gallium-indium alloy(EGaIn)onto the conventional fabric using screen printing technique.After the packaging,the sensing performance of the sensor were tested.This sensor exhibited high sensitivity at 0.18 kPa-1,minimal hysteresis,swift response time of 140 ms,and recovery time of 180 ms,alongside exceptional cyclic durability and stability.The potential applications of the sensor in human activity monitoring,exemplified by tracking bicycle pedaling frequency and walking pace were discussed,affirming its effectiveness in motion analysis and health surveillance.This work validates the feasibility and potential of this novel flexible pressure sensor,and insights for future research endeavors and practical implementations was provided.

gallium based liquid metalcapacitive pressure sensorGalinstanCBwearable devicesscreen printingmotion monitoring

金皓、张宇、秦亚飞、李泰泉

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昆明理工大学机电工程学院,云南昆明 650504

镓基液态金属 电容式压力传感器 镓铟锡合金 炭黑 可穿戴设备 丝网印刷 运动监测

国家自然科学基金云南省基础研究计划面上项目

52165066202101AT070106

2024

电子元件与材料
中国电子学会 中国电子元件行业协会 国营第715厂(成都宏明电子股份有限公司)

电子元件与材料

CSTPCD北大核心
影响因子:0.491
ISSN:1001-2028
年,卷(期):2024.43(4)
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