Design of HFO2 ferroelectric thin-film phase shifter
The phase shifter as the key component of the array antenna is usually utilized to control the phase difference between the antenna elements in order to achieve beam scanning.A K-band HFO2 ferroelectric thin film phase shifter was designed based on the theory of transmission line periodically loading a variable capacitor.In order to achieve a compact phase shifter with low insertion loss,a coplanar waveguide interdigital capacitor structure was adopted.In comparison with traditional BST,the HFO2 ferroelectric material affer advantages such as larger tuning rate,thinner thickness,lower loss tangent,and easier integration.By altering the dielectric constant of the HFO2 material,and phase change can be achieved.The resulting phase shifter has a very compact size.Simulation results show that the dielectric constant of ferroelectric thin film can be changed by applying DC bias voltage.The phase shift of the phase shifter at 22 GHz is 80°,the maximum insertion loss is-2.5 dB,and the return loss is better than-10 dB.
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