宽带滤波器传输线法去嵌的研究
Research on the de-embedding of broadband filter transmission line method
周艺蒙 1帅垚 2胡月 1吴传贵 2张万里2
作者信息
- 1. 重庆邮电大学光电工程学院,重庆 400065
- 2. 电子科技大学电子薄膜与集成器件国家重点实验室,四川成都 610054;电子科技大学重庆微电子产业技术研究院,重庆 401332
- 折叠
摘要
为准确获取谐振器材料参数,采用开路短路法、集总参数法、传输线法三种方法分别对谐振器进行去嵌,并分析去嵌对滤波器产生的影响.其中传输线法去嵌无需流片,仿真即可得出谐振器测试结构的寄生参数.采用传输线法对串联、并联谐振去嵌,并运用去嵌后的谐振器材料参数搭建滤波器,滤波器采用九阶π型电路拓扑结构,其带宽为160 MHz,阻带抑制为-25 dB.证实谐振器的测试结构对宽带声表面波滤波器带宽、阻带和零点造成影响,使得去嵌后的滤波器左侧零点向低频偏移,低频抑制上升,高频抑制下降,通带插入损耗增加.
Abstract
Various methods were used to de-embed the resonator and analyze the effect of de-embedding on the filter to obtain accurate material parameters of the resonator.Three methods were used to de-embed the resonator,namely,the open-circuit short-circuit method,the lumped-parameter method,and the transmission line method.Among them,the transmission line method does not require tapeout,and parasitic parameters of the resonator can be derived from simulation.The series and shunt resonators were de-embedded by the transmission line method,and the filter was constructed by using the material parameters of the de-embedded resonator.The filter adopts a ninth-order π-circuit topology with a bandwidth of 160 MHz and a rejection of-25 dB.It is demonstrated that the test structure of the resonator could affect the bandwidth,the stopband,and the zero point of the broadband SAW filter.After de-embedding,the zero point of the left side of the de-embedded filter shifts towards lower frequency,and the low-frequency rejection increases,and the high-frequency rejection decreases,and the passband insertion loss increases.
关键词
去嵌/开路短路法/集总参数法/传输线法/宽带滤波器/π型电路拓扑结构Key words
de-embedding/open-circuit short-circuit method/lumped parameter method/transmission line method/broadband SAW filter/π-type circuit topology引用本文复制引用
基金项目
四川省科技计划基金资助项目(2020YF0002)
出版年
2024
国家科技期刊平台
NSTL
万方数据