Research on the de-embedding of broadband filter transmission line method
Various methods were used to de-embed the resonator and analyze the effect of de-embedding on the filter to obtain accurate material parameters of the resonator.Three methods were used to de-embed the resonator,namely,the open-circuit short-circuit method,the lumped-parameter method,and the transmission line method.Among them,the transmission line method does not require tapeout,and parasitic parameters of the resonator can be derived from simulation.The series and shunt resonators were de-embedded by the transmission line method,and the filter was constructed by using the material parameters of the de-embedded resonator.The filter adopts a ninth-order π-circuit topology with a bandwidth of 160 MHz and a rejection of-25 dB.It is demonstrated that the test structure of the resonator could affect the bandwidth,the stopband,and the zero point of the broadband SAW filter.After de-embedding,the zero point of the left side of the de-embedded filter shifts towards lower frequency,and the low-frequency rejection increases,and the high-frequency rejection decreases,and the passband insertion loss increases.