基于微纳米纤维的多层次微结构设计制备及其传感应用
Design,fabrication and sensing application of hierarchical microstructures based on micro/nano fibers
罗敬之 1金育安 1孔浩宇 1李光勇 1张明华 1杜建科1
作者信息
- 1. 宁波大学 机械工程与力学学院,智能结构与压电器件实验室,宁波 315211
- 折叠
摘要
微结构化是提高柔性压力传感器性能的重要技术手段之一,本文提出一种基于微纳米纤维的多层次微结构设计与快速制备方法.首先采用近场直写与熔融沉积成型一体化成形工艺制备出具有多尺度纤维的牺牲支架,在聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)中掺杂碳纳米管(Carbon nanotubes,CNTs)作为柔性传感器的介电层材料,通过牺牲模板法制备出具有多层次微结构的CNTs/PDMS柔性介电层;进一步研究了多层次微结构的设计参数对其传感性能的影响.实验结果表明:设计的微结构能显著增强柔性传感器的输出电性能.其中高度为 1.3 mm、间距为 1.5 mm的多层次微结构在频率为 3 Hz、压力载荷为 14 N下输出电性能最为优异;此外,制备的传感器经过 20 000次循环测试,表现出良好的稳定性与耐久性.最后,设计了一款用于观察足底压力分布及步态检测的柔性压力传感鞋垫,结果表现出良好灵敏度和稳定性.本文为低成本快速制备多层次微结构提供新的思路,为制备高性能柔性压力传感器提供参考与借鉴.
Abstract
Microstructuring is one of the important techniques to improve the performance of flexible pressure sensors.In this paper,a method for designing and fabricating hierarchical microstructures based on micro/nano fibers was proposed.First,a sacrificial mold with hierarchical microstructures was prepared by integrating near-field direct writing and fused deposition modeling.Carbon nanotubes(CNTs)were doped into polydimethylsilox-ane(PDMS)as the dielectric layer material for the flexible sensor.The CNTs/PDMS flexible dielectric layer with hierarchical microstructures was then prepared by sacrificial template method.Furthermore,the effect of design parameters of hierarchical microstructures on the sensing performance was studied.The experimental results show that the designed microstructures can significantly enhance the output electrical performance of the flexible sensor.Among them,the hierarchical microstructure with a height of 1.3 mm and a spacing of 1.5 mm exhibits the best out-put electrical performance under a pressure load of 14 N at a frequency of 3 Hz.In addition,the fabricated sensor exhibits good stability and durability after 20 000 cycles of testing.Finally,a flexible pressure sensing insole was designed for observing the distribution of foot pressure and gait detection,which demonstrates good sensitivity and stability.This study provides a new approach for low-cost and rapid fabrication of hierarchical microstructures and serves as a reference for the development of high-performance flexible pressure sensors.
关键词
多尺度一体化成形/微纳米纤维/多层次微结构/自供电/柔性压力传感器/碳纳米管Key words
multi-scale integrated fabrication/micro/nano fibers/hierarchical microstructure/self-powered/flexible pressure sensor/CNT引用本文复制引用
基金项目
国家自然科学基金(52275343)
浙江省自然科学基金(LY23E050003)
出版年
2024
NETL
NSTL
维普
万方数据