基于PTFE/ZnO/Ti3C2Tx复合薄膜的抗湿性氨气传感器研究
Humidity-resistant ammonia sensor based on PTFE/ZnO/Ti3C2Tx composite films
高风娇 1常雪婷 2李俊峰 1王东胜 2高炜翔 1孙士斌3
作者信息
- 1. 上海海事大学 物流工程学院,上海 201306
- 2. 上海海事大学 海洋材料科学与工程研究院,上海 201306
- 3. 上海海事大学 物流科学与工程研究院,上海 201306
- 折叠
摘要
开发基于半导体功能材料的抗湿性室温气体传感器一直都是气体传感器领域的研究热点和难点.本文从金属氧化物半导体的高灵敏度和稳定性、MXene(Ti3C2Tx)的室温气敏性以及聚四氟乙烯(PTFE)的疏水性出发,以MXene薄膜为基体,采用磁控溅射法分别将ZnO和PTFE沉积到Ti3C2Tx表面,制备了PTFE/ZnO/MXene复合薄膜,同时构筑了基于复合薄膜的气体传感器.通过SEM、TEM和XPS对复合薄膜进行了表征,并对气体传感器的气敏性能和抗湿性能进行了研究.研究结果表明:基于PTFE/ZnO/Ti3C2Tx复合薄膜的气体传感器在室温下对氨气具有良好的选择性、较高的灵敏度和优异的循环稳定性.随着PTFE薄膜厚度的增加,基于复合薄膜的气体传感器的抗湿性能逐渐增加,但灵敏度有所下降.
Abstract
The development of moisture-resistant room-temperature gas sensors based on semiconductor functional materials has always been a hot and difficult research topic in the field of gas sensors.Considering the high sensitivity and stability of metal oxide semiconductor,the room-temperature gas-sensing behaviors of MXene(Ti3C2Tx)and the hydrophobicity of polytetrafluoroethylene(PTFE),the PTFE/ZnO/MXene composite films were prepared by depositing the PTFE and ZnO layers orderly onto the MXene film surface via a magnetron sputtering method,followed by the construction of the gas sensors based on the composite films.The PTFE/ZnO/MXene composite films were characterized by SEM,TEM and XPS,and the gas-sensing and humidity-resistant properties of the composite films-based gas sensors were investigated.Results show that the PTFE/ZnO/Ti3C2Tx composite films-based gas sensors exhibite good selectivity,high sensitivity,and excellent reproducibility towards ammonia at room temperature.With the increase of the thickness of the PTFE layers,the humidity resistance of the composite films-based gas sensors gradually increases,but at the cost of sensitivity.
关键词
PTFE/ZnO/MXene复合薄膜/抗湿性/磁控溅射/气体传感器/氨气Key words
PTFE/ZnO/MXene composite films/moisture resistance/magnetron sputtering/gas sensor/ammonia引用本文复制引用
基金项目
上海市自然科学基金(21ZR1426700)
出版年
2024
NETL
NSTL
万方数据