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激光干涉仪的线性测量误差及分析

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文章介绍了激光干涉仪的线性测量原理,通过线性测量原理了解测量过程中可能产生的误差.为了减少或消除测量过程所产生的误差对机床线性轴线相关精度的影响,在深入分析死程误差、余弦误差、阿贝(Abbe)偏置误差等常见测量误差基础上,提出了减少或消除测量误差的相应措施或解决方法,一定程度上提高了数控机床线性精度测量的精度准确性和可靠.
Linear Measurement Error and Analysis of Laser Interferometer
The article introduces the linear measurement principle of laser interferometers,and uses the linear measurement principle to understand the possible errors that may occur during the measurement process.In order to reduce or eliminate the impact of measurement errors on the linear axis accuracy of machine tools,based on in-depth analysis of common measurement errors such as dead range error,cosine error,and Abbe bias error,corresponding measures or solutions to reduce or eliminate measurement errors are proposed,which to some extent improves the accuracy and reliability of linear accuracy measurement in CNC machine tools.

CNC machine toolsLaser interferometerLinear measurementMeasurement error

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福建省产品质量检验研究院,福建 福州 350002

数控机床 激光干涉仪 线性测量 测量误差

2024

福建农机
福建省机械科学研究院  福建省农机管理局  福建省农业机械学会

福建农机

影响因子:0.229
ISSN:1004-3969
年,卷(期):2024.(2)