粉末冶金技术2024,Vol.42Issue(1) :29-35.DOI:10.19591/j.cnki.cn11-1974/tf.2023020012

放电等离子烧结制备细晶AlN陶瓷

Preparation of nanocrystalline AlN ceramics by spark plasma sintering

赵东亮 何庆 朱在稳 尹海清 秦明礼
粉末冶金技术2024,Vol.42Issue(1) :29-35.DOI:10.19591/j.cnki.cn11-1974/tf.2023020012

放电等离子烧结制备细晶AlN陶瓷

Preparation of nanocrystalline AlN ceramics by spark plasma sintering

赵东亮 1何庆 2朱在稳 3尹海清 4秦明礼5
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作者信息

  • 1. 河北中瓷电子科技股份有限公司,石家庄 050200
  • 2. 厦门产业技术研究院,厦门 361001;厦门钜瓷科技有限公司,厦门 361100
  • 3. 厦门产业技术研究院,厦门 361001
  • 4. 北京科技大学材料基因工程北京高精尖中心,北京 100083;北京科技大学钢铁共性技术协同创新中心,北京 100083
  • 5. 北京科技大学新材料技术研究院,北京 100083
  • 折叠

摘要

采用纯纳米AlN粉和掺杂质量分数 3%Y2O3 的纳米AlN粉为原料,经放电等离子烧结工艺制备AlN陶瓷,研究了两类AlN陶瓷的相对密度、微观组织、力学性能和导热性能.结果表明:纯纳米AlN粉和掺杂Y2O3 纳米AlN粉在 40~60 MPa下,经 1500℃放电等离子烧结 5~60 min,均可获得相对密度>99%的AlN陶瓷.当烧结压力为 50 MPa时,获得的AlN陶瓷晶粒尺寸最小,分别为 176 nm和 190 nm,细化晶粒明显提高了AlN陶瓷硬度和抗弯强度.当烧结时间从 5 min延长至 60 min时,两种AlN陶瓷晶粒尺寸分别增大至 1.71 μm和 1.73 μm.晶粒长大导致AlN陶瓷硬度和抗弯强度下降,但提升了导热性能.通过对比发现,相同放电等离子烧结工艺下添加烧结助剂Y2O3 能够有效提升AlN陶瓷的综合性能.

Abstract

AlN ceramics were prepared by spark plasma sintering(SPS)using the pure nano-AlN powders and the nano-AlN powders doped by 3%Y2O3(mass fraction)as the raw materials.The relative density,microstructure,mechanical properties,and thermal conductivity of two types of AlN ceramics were studied.The results show that,both the pure nano-AlN powders and the nano-AlN powders doped by Y2O3 can obtain the AlN ceramics with the relative density above 99%prepared by SPS at 1500℃for 5~60 min under 40~60 MPa.When the sintering pressure is 50 MPa,the average grain size of the AlN ceramics is the smallest,which is 176 nm and 190 nm,respectively.The hardness and bending strength of the AlN ceramics are obviously improved by the grain refinement.When the sintering time is extended from 5 min to 60 min,the grain size of the AlN ceramics is increased to 1.71 μm and 1.73 μm,respectively.The grain growth leads to the decrease of hardness and bending strength of the AlN ceramics,but improves the thermal conductivity.It is found that the addition of Y2O3 sintering agent can effectively improve the comprehensive properties of the AlN ceramics under the same SPS sintering process.

关键词

AlN陶瓷/放电等离子烧结/晶粒细化/Y2O3

Key words

AlN ceramics/spark plasma sintering/grain refinement/Y2O3

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基金项目

河北省省级科技计划资助项目(20311001D)

出版年

2024
粉末冶金技术
中国机械工程学会,中国金属学会,中国有色金属学会,北京科技大学

粉末冶金技术

CSTPCD北大核心
影响因子:0.341
ISSN:1001-3784
参考文献量7
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