摘要
氮化铝(AlN)具有高导热、绝缘、低膨胀、无磁等优异性能,是半导体、电真空等领域高端装备的关键材料,特别是在航空航天、轨道交通、新能源装备、高功率LED、5G通讯、电力传输、工业控制等领域功率器件中具有不可取代的作用.高品级粉体是制备高性能陶瓷的基础,氮化铝粉体的性质直接影响了后续成形、烧结等工艺以及材料的组织和性能.碳热还原氮化法制备氮化铝粉体具有纯度高、粒度细和烧结性好等特点,本文综述了氮化铝粉末的评价指标以及碳热还原氮化法制备氮化铝粉末的研究进展,提出未来研究与产业化的方向与趋势.
Abstract
Aluminum nitride(AlN)has high thermal conductivity,good insulation,low thermal expansion coefficient,non-magnetic,and other excellent properties used as a key material for high-end equipment in semiconductor,electric vacuum,and other fields.Especially in aerospace,rail transportation,new energy equipment,high-power LED,5G communication,power transmission,industrial control,and other fields of power devices,AlN has an irreplaceable role.The high-grade powders are the basis for the preparation of high-performance ceramics.The properties of AlN powders directly affect the forming,sintering,microstructure,and performance of the AlN ceramics.Carbothermal reduction-nitridation method is a promising method to produce the AlN powders with high purity,fine particle size,and high sintering property.The evaluation indexes of the AlN powders and the research progress on the carbothermal reduction-nitridation of AlN powders were reviewed in this paper,and the direction and trend of future research and industrialization were proposed.
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