The charge effect problem of non-conductive samples has a significant impact on X-ray photoelectron spectroscopy(XPS)test results,often leading to abnormal phenomena such as peak displacement,distortion,broadening,intensity attenuation,etc.Therefore,XPS researchers should pay attention to reducing the surface charge accumulation on non-conductive samples to minimise the charge effect on test results.Aiming at the charge effect problem that non-conductive samples easily generate during XPS testing,the causes were discussed based on the studies of sample selection and preparation,charge neutralization system,electrical contact,illumination.And the improvement methods of charge effect were proposed.
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