首页|Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process

Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process

扫码查看
Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for sup-porting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an inno-vative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated process-ing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(129Xe)and xenon-131(131Xe)under different pump-probe schemes demonstrate the suit-ability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic mag-netometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.

Microfabricated atomic vapor cellsInner-sidewall moldingMultiple optical channelsQuantum sensing

Mingzhi Yu、Yao Chen、Yongliang Wang、Xiangguang Han、Guoxi Luo、Libo Zhao、Yanbin Wang、Yintao Ma、Shun Lu、Ping Yang、Qijing Lin、Kaifei Wang、Zhuangde Jiang

展开 >

International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an 710049,China

School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,China

Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing,Yantai 265503,China

Moon Environment Technology Co.Ltd.,Yantai,264000,China

Emergency Department,The First Affiliated Hospital of Xi'an Jiaotong University Xi'an 710061,China

展开 >

National Key Research and Development PlanNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNatural Science Foundation of Shaanxi

2022YFB320340062103324U19092212022JQ-554

2024

工程(英文)

工程(英文)

CSTPCDEI
ISSN:2095-8099
年,卷(期):2024.35(4)