首页|MEMS Huygens Clock Based on Synchronized Micromechanical Resonators
MEMS Huygens Clock Based on Synchronized Micromechanical Resonators
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NETL
NSTL
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With the continuous miniaturization of electronic devices,microelectromechanical system(MEMS)oscil-lators that can be combined with integrated circuits have attracted increasing attention.This study reports a MEMS Huygens clock based on the synchronization principle,comprising two synchronized MEMS oscillators and a frequency compensation system.The MEMS Huygens clock improved short-time stability,improving the Allan deviation by a factor of 3.73 from 19.3 to 5.17 ppb at 1 s.A frequency compensation system based on the MEMS oscillator's temperature-frequency characteristics was devel-oped to compensate for the frequency shift of the MEMS Huygens clock by controlling the resonator cur-rent.This effectively improved the long-term stability of the oscillator,with the Allan deviation improving by 1.6343 × 105 times to 30.9 ppt at 6000 s.The power consumption for compensating both oscillators simultaneously is only 2.85 mW·℃-1.Our comprehensive solution scheme provides a novel and precise engineering solution for achieving high-precision MEMS oscillators and extends synchroniza-tion applications in MEMS.
Frequency stabilityHuygens clockMEMSOscillatorSynchronization
NETL
NSTL
万方数据
