Development of an Integrated CMUTs-Based Resonant Biosensor for Label-Free Detection of DNA with Improved Selectivity by Ethylene-Glycol Alkanethiols

扫码查看

原文链接

万方数据
维普

外文摘要：Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial and point-of-care applications,enabling label-free detection of biomarkers such as DNA and antibodies.Capacitive micromachined ultrasonic transducers(CMUTs)are promising tools for developing miniaturized high-performance biosensing complementary metal-oxide-silicon(CMOS)platforms.However,their oper-ability is limited by inefficient functionalization,aggregation,crosstalk in the buffer,and the requirement for an external high-voltage(HV)power supply.In this study,we aimed to propose a CMUTs-based res-onant biosensor integrated with a CMOS front-end interface coupled with ethylene-glycol alkanethiols to detect single-stranded DNA oligonucleotides with large specificity.The topography of the functional-ized surface was characterized by energy-dispersive X-ray microanalysis.Improved selectivity for on-chip hybridization was demonstrated by comparing complementary and non-complementary single-stranded DNA oligonucleotides using fluorescence imaging technology.The sensor array was further characterized using a five-element lumped equivalent model.The 4 mm2 application-specific integrated circuit chip was designed and developed through 0.18 pm HV bipolar-CMOS-double diffused metal-oxide-silicon(DMOS)technology(BCD)to generate on-chip 20 V HV boosting and to track feedback frequency under a standard 1.8 V supply,with a total power consumption of 3.8 mW in a continuous mode.The measured results indicated a detection sensitivity of 7.943 × 10-3 pmol·L-1·Hz-1 over a concentration range of 1 to 100 μmol·L-1.In conclusion,the label-free biosensing of DNA under dry conditions was successfully demonstrated using a microfabricated CMUT array with a 2 MHz frequency on CMOS electronics with an internal HV supplier.Moreover,ethylene-glycol alkanethiols successfully deposited self-assembled monolayers on aluminum electrodes,which has never been attempted thus far on CMUTs,to enhance the selectivity of bio-functionalization.The findings of this study indicate the possibility of full-on-chip DNA biosensing with CMUTs.

外文关键词：

Capacitive micromachined ultrasonic transducers(CMUTs)DNA detectionSelf-assembled monolayer(SAM)Ethylene-glycol alkanethiolsApplication-specific integrated circuit(ASIC)

作者：

Zhikang Li、Yihe Zhao、Gian Luca Barbruni、Jie Li、Zixuan Li、Jiawei Yuan、Ping Yang、Libo Zhao、Zhuangde Jiang、Sandro Carrara

展开 >

作者单位：

State Key Laboratory for Manufacturing Systems Engineering,the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an 710049,China

Xi'an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System,Yantai 264003,China

School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an 710049,China

School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,China

Shandong Laboratory of Yantai

Bio/CMOS Interfaces Laboratory,Institute of Electrical and Microengineering,School of Engineering,École Polytechnique F éd érale de Lausanne,Neuchatel 2000,Switzerland

College of Mechanical and Electrical Engineering,Shaanxi University of Science and Technology,Xi'an 710021,China

展开 >

基金：

National Key Research and Development Program of ChinaNational Natural Science Foundation of ChinaPostdoctoral Innovation Talents Support ProgramPostdoctoral Science Foundation of Shaanxi Province

项目编号：

2022YFB320540052275570BX202302882018BSHEDZZ08

出版年：

2024

DOI：

10.1016/j.eng.2023.12.015

工程(英文)

CSTPCDEI

ISSN：2095-8099

年,卷(期)：2024.41(10)