Photoelectron spectroscopy is an essential surface analysis technology.This paper introduced the principle and category of photoelectron spectroscopy,and some examples of photoelectron spectroscopy in oxide films and metal/oxide films,which are two significant model catalysts,and elaborated the applications of photoelectron spectroscopy in oxide films and metal/oxide films to analyze the elemental composition,content,chemical state,and electronic structure,thus showing the importance of photoelectron spectroscopy in studying the preparation and thermal stability of model catalysts.