Determination the Thickness and Chemical Composition of Each Layer in the Composite Film by the Combination of Scanning Electron Microscopy-Energy Dispersive Spectroscopy and Infrared Spectroscopy
Determination the Thickness and Chemical Composition of Each Layer in the Composite Film by the Combination of Scanning Electron Microscopy-Energy Dispersive Spectroscopy and Infrared Spectroscopy
Scanning electron microscopy-energy dispersive spectroscopy(SEM-EDS)was established to determine the thickness and elemental composition of each layer of the composite film,and infrared spectroscopy(IR)was used to identify the chemical composition of each layer.Firstly,the liquid nitrogen embrittlement method was used to obtain the flat cross-section of the film,and the cross-sectional morphology was observed in the electron microscope to determine the number of layers of the film.Secondly,the point scanning method of EDS was used to identify the elemental composition of each layer.Thirdly,the target element was selected for line scanning to determine the thickness of each layer.Finally,IR was used to identify the material type of each layer of the film.Taking two composite films and one photovoltaic backsheet as examples,the detection results were intuitive and accurate.This combination method could also be applied to the analysis of other multilayer materials.
关键词
扫描电子显微镜/能谱/红外光谱/复合薄膜/厚度
Key words
scanning electron microscopy/energy dispersive spectroscopy/infrared spectroscopy/composite film/thickness