广东化工2024,Vol.51Issue(16) :162-163,195.DOI:10.3969/j.issn.1007-1865.2024.016.051

联用扫描电镜-能谱法和红外光谱法测定复合薄膜中各层厚度和化学成分

Determination the Thickness and Chemical Composition of Each Layer in the Composite Film by the Combination of Scanning Electron Microscopy-Energy Dispersive Spectroscopy and Infrared Spectroscopy

黎军 霍斯欣 沈宏林 罗家和 陈侣平
广东化工2024,Vol.51Issue(16) :162-163,195.DOI:10.3969/j.issn.1007-1865.2024.016.051

联用扫描电镜-能谱法和红外光谱法测定复合薄膜中各层厚度和化学成分

Determination the Thickness and Chemical Composition of Each Layer in the Composite Film by the Combination of Scanning Electron Microscopy-Energy Dispersive Spectroscopy and Infrared Spectroscopy

黎军 1霍斯欣 1沈宏林 1罗家和 1陈侣平1
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作者信息

  • 1. 广东产品质量监督检验研究院,广东 广州 510330
  • 折叠

摘要

应用扫描电子显微镜-能谱法(SEM-EDS),测定复合薄膜各层厚度和元素组成,使用红外光谱法(IR)鉴定各层化学成分.首先使用液氮脆断法得到平整的薄膜横截面,在电镜中观察截面形貌,判定薄膜的层数,其次使用EDS点扫描方法鉴定各层元素构成,再次选择目标元素进行线扫描分析,测定各层厚度,最后应用红外光谱法鉴定薄膜各层的材料类型.以 2 种复合薄膜和 1 种光伏背板为例进行分析,检测结果直观、准确.这种联用方法也可以应用于对其他多层材料分析.

Abstract

Scanning electron microscopy-energy dispersive spectroscopy(SEM-EDS)was established to determine the thickness and elemental composition of each layer of the composite film,and infrared spectroscopy(IR)was used to identify the chemical composition of each layer.Firstly,the liquid nitrogen embrittlement method was used to obtain the flat cross-section of the film,and the cross-sectional morphology was observed in the electron microscope to determine the number of layers of the film.Secondly,the point scanning method of EDS was used to identify the elemental composition of each layer.Thirdly,the target element was selected for line scanning to determine the thickness of each layer.Finally,IR was used to identify the material type of each layer of the film.Taking two composite films and one photovoltaic backsheet as examples,the detection results were intuitive and accurate.This combination method could also be applied to the analysis of other multilayer materials.

关键词

扫描电子显微镜/能谱/红外光谱/复合薄膜/厚度

Key words

scanning electron microscopy/energy dispersive spectroscopy/infrared spectroscopy/composite film/thickness

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出版年

2024
广东化工
广东省石油化工研究院

广东化工

影响因子:0.288
ISSN:1007-1865
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