With the rapid development of China's semiconductor industry,the usage and discharge of pure water in the production process have been increasing continuously.This article systematically summarizes the characteristics and main types of wastewater in the semiconductor industry,and summarizes various wastewater treatment methods and their advantages and disadvantages.It also explores the wastewater regeneration process and the membrane fouling mechanism and solutions.Finally,this article anticipates the future development of wastewater treatment and regeneration in the semiconductor industry.
关键词
半导体行业废水/处理工艺/废水再生/膜污堵
Key words
semiconductor industry wastewater/treatment process/wastewater regeneration/membrane fouling
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